Solid State RF Power Generators

       Solid State RF generators including 2MHz, 13.56MHz, 27MHz, 64MHz frequency are most commonly used in plasma process. Wattsine can provides output power of 1KW, 3KW, 10KW, 20KW,etc., as per customers’ different requirements.

Features:

    • Frequency stability ±3%
    • Wide load adaptability
    • High reliability

Applications:

        Solid state RF generators are designed for all plasma processing applications including PECVD, HDPCVD, PVD, ALD, etc. and for manufacture of integrated circuits, solar cells, flat panel displays(FPD), LED and data storage devices.

 Technical parameters sheet:
 
Model Specification
(Click)
Freq. (MHz) Pout (W) Vin (V) Efficiency (%) Heat Dissipation
WSPS-13.56-1000 13.56 1000 220V 65 Air cooling
WSPS-13.56-3000 13.56 3000 220V 65 Water cooling
WSPS-27-1000 27 1000 220V 65 Air cooling
WSPS-27-3000 27 3000 220V 65 Water cooling
WSPS-64-1000 64 1000 220V 65 Air cooling
WSPS-64-3000 64 3000 220V 65 Water cooling
WSPS-162-1000 162.5 1000 220V 65 Air cooling
WSPS-162-3000 162.5 3000 220V 65 Water cooling
WSPS-325-800 325 800 220V 60 Air cooling
WSPS-325-1500 325 1500 220V 60 Water cooling
WSPS-325-3000 325 3000 220V 60 Water cooling
WSPS-433-100 433 100 28V 65 Air cooling

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