2026-09-21
Is a 13.56 MHz RF generator mandatory for semiconductor plasma cleaning?
FAQ. source:FAQ. author:wattsine

Yes. The 13.56 MHz RF generator is the general standard frequency for precision semiconductor processes, offering high plasma activity, minimal thermal damage, and excellent cleaning uniformity, making it suitable for precision workpieces such as wafers and chips. Low-frequency power supplies tend to cause substrate damage and are not applicable to high-precision semiconductor applications.

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