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Microwave Plasma CVD System

DM-10000
2450MHz | 10kW
DM-10000 microwave plasma CVD system can provide ≥3inch diameter diamond production capacity. Designed with fully imported integrated gas supply system, fully automatic windows control system, to achieve high efficiency, unmanned management of diamond stable batch output.
    • Precision design
      Independent intellectual property rights of the MPCVD machines owned by Wattsine,precision design and simulation
    • High stability
      With Wattsine's 2450MHz-10kW solid-state power source for extreme frequency and power stability
    • Integrated diamond growth process
      Integrated diamond growth process, the diameter of plasma discharge area up to 82mm, the diameter of uniform deposition area is 3inch≥3inch
    • Integrated gas supply system
      Imported integrated gas supply system and high reliable pressure control system
    • Fully automatic control
      Windows System and intelligent software control system, support for fully automatic operation
    • Multi-management
      Multiple authority hierarchical management, system security interlocking
    • Online real-time monitoring
      Three window to real-time monitoring and judgment the sample and plasma state, to realize visualization and quantifiable detection of production process
Technical Specifications
ModelDM-10000
Microwave frequency2450MHz,stability<±50ppm
Microwave power0.5-10kWcontinuous adjustable,stability≤1%
Reaction chamberdouble-layer water-cooled stainless steel
molybdenum sample stageφ≥82mm
ultimate vacuum degree≤3.7x10-3Torr or ≤6x10-6Torr(molecular pump)
Vacuum leakage rate≤5x10-10Pa.m³/s(He)
working air pressure
5-226Torr,±0.1Torr
Gas systemH₂/CH₄/N₂/O₂ (CO₂Ar is available),can be extended
Temperature measurement system300~1400℃ single color or double color 600~1800℃
Control systemcomputer control, manual/automatic control, video monitoring, modular growth process flow
Dimensions0.9m*2m*1.9m
Weight820kg


Application Scope
Diamond bulk growth
MPCVD设备适合大面积与高品质单晶金刚石、多晶金刚石批量生长,
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028 - 85964177
minhong.wan@wattsine.com