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Microwave Plasma CVD System

HMPS-9750S
915MHz | 75kW
HMPS-9750S microwave plasma CVD system is a comprehensive experimental and industrialization equipment suitable for the preparation of 6-inch and larger nanocrystalline primary ultrafine nanocrystalline diamond, optical-grade CVD diamond windows, and CVD single-crystal diamond thermal sheets.
    • Precision design
      Designed with the new generation of large volume lower-fed large annular cavity, with precision design and simulation, to carry high power
    • High stability
      High power, high stability solid-state or switching microwave power generator
    • High-reliability
      Designed with imported high-precision MFC to ensure the high-reliable and stable pressure control system
    • Intelligent control
      With intelligent software control system, manual / automatic control is available
    • Air Cooling
      The plasma is far away from the quartz window, and quartz window use air-cooled to dissipate heat
    • Multi-management
      Multiple security interlocks,Tiered management of multiple permissions
Technical Specifications
ModelHMPS-9750S
Microwave frequency9750MHz,stability<±50ppm
Microwave power75kWmax,10-100% continuous adjustable,stability≤1%
Reaction chamberdouble-layer water-cooled aluminum alloy
molybdenum sample stageφ≥200mm
ultimate vacuum degree≤6x10-6Torr(molecular pump)
Vacuum leakage rate≤5x1.0-10Pa.m³/s(He)
working air pressure
8-220Torr,±0.1Torr
Gas systemH₂/CH₄/N₂/O₂ (CO₂Ar is available),can be extended
Temperature measurement system300~1400℃ single color or double color 600~1800℃
Control systemPLC control, manual / automatic control available)
Dimensions4.9m*2.7m*2.7m
Weight4500kg


Application Scope
Batch growth of polycrystalline diamonds
MPCVD设备适用于大面积、高品质多晶金刚石的批量制备
Diamond bulk growth
MPCVD设备适合大面积与高品质单晶金刚石、多晶金刚石批量生长,
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028 - 85964177
minhong.wan@wattsine.com